Meet Our Engineering Staff
Zhang Yulong
Senior Engineer
Responsible for: Alcatel deep silicon etch system, confocal laser scanning microscope, and aluminum wire press welder
Email: zyl98@xmu.edu.cn
Phone: 86-592- 2186890
Office: Yixuan Building 202-1
Zeng Yibo
Senior Engineer
Responsible for: cleaning, etching, chemical-mechanical polishing machine, IV/CV semiconductor characterization system, plasma degumming machine, and washer extractor
Email: zyb2005@xmu.edu.cn
Phone: 86-592- 2187739
Office: Yixuan Building 202-2
Lv Wenlong
Senior Engineer
Responsible for: PECVD, program-controlled diffusion furnace, 4-inch and 4-stack diffusion furnace system, D41-11A-ZM four-point probe, quartz tube cleaning machine, and Dektak-3 film-thickness meter
Email: lwl1980@xmu.edu.cn
Phone: 86-592- 2186890
Office: Yixuan Building 202-1
Gu Dandan
Engineer
Responsible for: Karl Suss double-side lithography and bond alignment, Nikon L150 metallurgical microscope, AML bonder, and glue spraying machine
Email: gdd@xmu.edu.cn
Phone: 86-592- 2186890
Office: Yixuan Building 202-1
Jiang Shusen
Engineer
Responsible for: AML bonder, LPCVD, IV/CV semiconductor characterization system, aluminum wire press welder, confocal laser scanning microscope, and chemical-mechanical polishing machine
Email: hanson_jiang@xmu.edu.cn
Phone: 86-592- 2187739
Office: Yixuan Building 202-2
Zhang Yan
Engineer
Responsible for: Alcatel deep silicon etch system, LPCVD, plasma degumming machine, and scribing machine
Email: zhangyan2003@xmu.edu.cn
Phone: 86-592- 2186890
Office: Yixuan Building 202-1
Zhang Chunquan
Engineer
Responsible for: PECVD, electron beam deposit facilities, JC500-3-D magnetron sputtering coating machine, JS-3X-100B magnetron sputtering, ICP-2B etcher, and Dektak-3 film-thickness meter
Email: cqzhang@xmu.edu.cn
Phone: 86-592- 2186890
Office: Yixuan Building 202-1
Chen Binbin
Engineer
Responsible for: program-controlled diffusion furnace, 4-inch and 4-stack diffusion furnace system, D41-11A-ZM four-point probe, and quartz tube cleaning machine
Email: cbb81@xmu.edu.cn
Phone: 86-592- 2186890
Office: Yixuan Building 202-1
Su Lijin
Engineer
Responsible for: Karl Suss double-side lithography and bond alignment, Nikon L150 metallurgical microscope, and glue spraying machine
Email: lijinsu2003@126.com
Phone: 86-592- 2187739
Office: Yixuan Building 202-2
Wang Jiaqin
Engineer
Responsible for: clean room air-conditioning management and maintenance, liquid nitrogen filling, gas management, disposal of waste water, waste gas, and waste residues, heavy-current maintenance, and the scribing machine
Email: memsw@xmu.edu.cn
Phone: 86-592- 2187739
Office: Yixuan Building 202-2
Li Mingpo
Engineer
Responsible for: maintenance of mechanical equipment, drafting and manufacturing of small devices and parts, and clean room air-conditioning management as well as cleanliness measurement
Email: lixun06@xmu.edu.cn
Phone: 86-592- 2187739
Office: Yixuan Building 202-2
Zheng Lingling
Engineer
Responsible for: field emission scanning electron microscopy, sputter coating, lectron beam lithography, energy dispersive spectrometer
Email: zhengll@xmu.edu.cn
Phone: 86-592- 2186890
Office: Wenxuan Building B510