Research on Construction and Management Mode of XPS Large Vacuum Interconnection Characterization Platform
Liu Jiamei, Sun Yu, Meng Lingjie, Gao Lumei
(Instrumental Analysis Center, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, China)
Abstract:
Large vacuum interconnection test platform is a new development direction in the field of modern instrument analysis and testing, which could integrate different functions of equipment into a large vacuum system, and complete the preparation and characterization of materials at the same time.This paper discusses the construction background, construction process, configuration scheme and management mode of Xray photoelectron spectrometer largescale vacuum interconnection test platform, and innovative suggestions were put forward.
KeyWords:
Xray photoelectron spectrometer; large vacuum interconnection characterization platform; platform construction; platform management