The promotion of technological innovation efficiency of hightech industry is essential to the construction of innovation oriented province. In this paper, we use DEA model to estimate the efficiency of technology development and the efficiency of achievement transformation of hightech industry in Shaanxi Province, and analyze the affecting factors with the Tobit model. The results show that the efficiency of achievement transformation of hightech industry in Shaanxi province is slightly higher than that the efficiency of technology development, and industrial performance and marketization have significant effect on the efficiency of technology development, but industrial performance and technology digestion and absorption capacity have significant effect on the conversion efficiency. According to the conclusion, we put forward the corresponding policy recommendations.

western economy; technological innovation efficiency; hightech industry; DEA model