姓名:陈蓉
电话:027-87558744
职称:教授
邮箱:rongchen@hust.edu.cn
学校教师主页:/hust/mu_faculty/chenrong2/zh_CN/index.htm
陈蓉(Chen Rong,Professor),教授、博士生导师,华中科技大学柔性电子研究中心副主任、机械科学与工程学院院长助理、光学与电子信息学院双聘教授、中国科学院宁波材料技术与工程研究所客聘研究员。中国科学技术大学获学士学位,美国斯坦福大学(Stanford University)获硕士、博士学位。回国前担任美国英特尔研究院高级研究员。国家创新领军人才、国家高层次海外引才计划、教育部新世纪优秀人才支持计划等入选者。承担国基金重点项目、国家重大科学研究计划(973)青年项目等,主要研究方向为微纳制造工艺与装备,先后荣获德州仪器微电子领域女性领袖奖、半导体研究协会Simon Karecki奖、中国侨界“创新人才”贡献奖,日内瓦国际发明展评审团特别嘉许金奖、金奖、湖北省技术发明一等奖等十余项国内外奖项。
研究方向围绕着选择性原子层沉积方法、纳米颗粒改性、薄膜工艺与设备开发、柔性光电器件制备等展开,主持了包括国家自然科学基金重点项目、国家重大科学研究计划(973)青年科学家项目、湖北省创新群体等多个国家及省部级科研项目。在Nat. Comm., Adv Mater, Angew. Chem. Int. Ed, Small, Sci. Bullet., IJEM,OEA等国内外期刊上发表论文百余篇,申请发明专利80余项,授权50余项,包含9项国际专利。受邀在国内外学术会议上进行大会报告、邀请报告30余次。主编撰写了“十二五”重点出版物,受邀参与撰写了英文纳米系列丛书等。
学术兼任包括担任国际ALD大会执行委员会委员、国际ALD应用大会暨首届亚洲ALD大会主席、欧盟HERALD(COST action MP1402-欧洲科学技术合作组织) 成员、国际ECS大会ALD应用组委会委员, 担任Physica B编辑, 中国工程院旗舰期刊Engineering特邀青年通讯专家、中国兵器装备集团《表面技术》期刊评委会委员等,美国NSF基金、荷兰Technology Foundation STW、智利国家科技委员会评审、美国Lawrence-Berkeley国家实验室开放基金特邀评审专家,电气电子工程师学会IEEE Senior Member (纳米技术委员会)、美国真空学会(AVS)、美国电化学学会(ECS)、美国化学学会(ACS)、美国材料研究学会(MRS)、美国物理学会(APS)等国际学会会员,中国硅酸盐学会薄膜与涂层分会理事(兼任青年工作委员会委员)、中国机械工程学会机器人分会委员、机械工程学会、真空学会高级会员、湖北省人工智能学会理事,担任国家科学技术奖、全国创新争先奖、国家重点研发计划、国家自然科学基金等评审,Appl. Phys. Lett., J. Appl. Phys., ACS Nano, Chem. Mater., J. Phys.Chem., Langmuir, Appl. Surf. Sci.等期刊审稿人、Elsevier出版社书本计划审稿人等。
主要社会兼职包括中国人民政治协商会议第十一届、第十二届湖北省委员会委员、欧美同学会总会理事、武汉市欧美同学会副秘书长、湖北省政府办公厅特邀督查员、武汉市侨联第十届委员会顾问等。
微纳制造技术在催化剂设计、光电器件及传感器中的应用,主要包括以下几个方面:
选择性原子层沉积方法
纳米颗粒制备与改性
柔性电子制造薄膜生长工艺与装备
光电显示、光电转换器件制备与开发
具体内容可参见 http://anml.hust.edu.cn & http://moc973.hust.edu.cn
本科生课程:《Introduction of Nanotechnology》24/32,
公选课《生活中的纳米技术》16/32
研究生课程:《thin film technology》32/32
《先进制造工程学》4/64(博士生)
主持基金与项目
在研:
1. “面向柔性量子点显示稳定化的原子层沉积跨尺度制造方法研究” 国家自然科学基金重点项目(51835005),项目负责人
2. “基于选择性原子层沉积的高效水煤气变换反应纳米催化剂设计与精细制备”国家自然科学基金国际(地区)合作与交流项目(51911540476),负责人
3. “原子尺度制造与测量”,湖北省自然科学基金创新群体(2020CFA030),负责人
4. “量子点膜的封装技术研究”武汉市应用基础前沿项目,负责人
5. “硅光片上集成隔离器磁性材料开发项目”,华为产学研(YBN2019105148),负责人
6. “原子层沉积装备和工艺高价值专利组合培育项目”,武汉市知识产权运营服务体系建设第一批高价值专利组合培育项目(20201G06),负责人
7. “三维非规则结构的表面快速原子层沉积理论与方法”(2019kfyXMBZ025), 华中科技大学自主创新研究基金-重点项目,负责人
8. “基于压差质谱法高灵敏水氧渗透检测原理与设备研发”,数字制造装备与技术国家重点实验室自主课题(0225100102)重点项目,负责人
9. “贵金属减量化的ALD关键技术研究”,威孚环保产学研合作,负责人
10. “细长孔零件化学气相沉积涂覆关键技术示范应用(项目)- 高温运行合金部件超细超长内孔表面CVD 热防护渗层催渗理论(课题)”,制造基础技术与关键部件国家重点研发计划,90万,骨干
2.结题:
1. “高效金属-氧化物复合催化剂的理性设计与性能调控”,973国家重大科学研究计划青年项目(2013CB934800),首席科学家
2. “面向柔性电子制造的空间隔离原子层沉积系统基础研究”,国家自然科学基金面上项目(51575217),项目负责人
3. “微纳米颗粒原子层包覆关键技术与装备研究”,湖北省自然科学基金杰出青年基金(2015CFA034),项目负责人
4. “利用原子层沉积法实现可控组份、大小的纳米催化颗粒生长”,国家自然科学基金青年基金项目(51101064),项目负责人
5. “ALD薄膜封装技术开发”,华星光电产学研合作项目,项目负责人
6. “高稳定性的柔性量子点光电器件跨尺度制造的关键问题研究”,华中科技大学自主创新研究基金-重点项目(2016YXZD065),项目负责人
7. “通过ALD实现原子尺度调控的多界面催化剂研究”,数字制造装备与技术国家重点实验室自主课题(0225100063)重点项目,负责人
8. “微纳米颗粒高效原子层沉积包覆技术研究”,华中科技大学自主创新研究基金- 前沿探索基金项目(2014TS037),负责人
9. “常压原子层沉积系统设计与机理研究”,华中科技大学自主创新研究基金- 前沿探索基金项目(2012TS076),负责人
10. “利用原子层沉积生长纳米颗粒的理论与实验研究”,数字制造装备与技术国家重点实验室自主课题(0225100053)重点项目,负责人
荣誉与奖励
1. 2020年“湖北省女性科技创新人才”
2. 2020年华中科技大学“外事先进个人”
3. 2019年国家科技创新领军人才
4. 2019年华中科技大学师德先进个人
5. 2019年度华中科技大学重大学术进展
6. 2018年 湖北技术发明一等奖
7. 2018年 第46届日内瓦国际发明展评审团特别嘉许金奖
8. 2017年 第十二届中国硅酸盐学会青年科技奖提名奖
9. 华中科技大学2016年度知识产权奖
10. 中国侨界“创新人才”贡献奖
11. 第44届日内瓦国际发明展金奖,泰国国家研究评议会国际发明特别优异奖
12. 中青年科技创新领军人才计划获得者
13. 湖北省杰出青年基金获得者
14. 华中科技大学“十佳青年”
15. 教育部“新世纪优秀人才支持计划”
16. 半导体研究协会Simon Karecki
17. 德州仪器微电子领域女性领袖奖
代表性论文
1. Xiao Liu, Shuangfeng Jia, Ming Yang, Yuanting Tang, Yanwei Wen, Shengqi Chu, Jianbo Wang, Bin Shan*, Rong Chen*, “Activation of subnanometric Pt on Cu-modified CeO2 via redox-coupled atomic layer deposition for CO oxidation” Nature Comm. 2020, 11, 4240.
2. Rong Chen*, Yicheng Li, Jiaming Cai, Kun Cao, Han-Bo-Ram Lee “Atomic Level Deposition to Extend Moore’s Law and Beyond” Inter. J. Extreme Manufacturing 2020, 2, 022002. (invited topic review)
3. Kun Cao, Jiaming Cai, Rong Chen* “Inherent selective atomic layer deposition and applications” Chem. Mater. 2020, 32, 2195. (invited perspective)
4. Kun Cao, Jiaming Cai, Bin Shan, Rong Chen*, “Nanoparticles surface functionalization through atomic layer deposition” Sci. Bulletin 2020, 65, 678. (invited review)
5. Yun Li, Yingfei Xiong, Huizhi Yang, Kun Cao, Rong Chen*, “Thin film encapsulation for the organic light-emitting diodes via atomic layer deposition” J. Mater. Res. 2020, 35, 681. (invited review, cover)
6. Binze Zhou, Mengjia Liu, Yanwei Wen, Yun Li, Rong Chen* “Atomic Layer Deposition for Quantum Dots based Devices” Opto-Electronic Advances 2020, 3, 190043. (invited review, cover)
7. Ming Zhao, Kun Cao, Mengjia Liu, Jing Zhang, Rong Chen*, Zhiguo Xia* “Dual-shelled RbLi(Li3SiO4)2:Eu2+@Al2O3@ODTMS phosphor as a stable green emitter for high-power LED Backlights” Angew. Chem. Int. Ed. 2020, 59, 2.
8. Wentao Cong, Zoushuang Li, Kun Cao, Guang Feng, Rong Chen* “Transient analysis and process optimization of the spatial atomic layer deposition using the dynamic mesh method” Chem. Eng. Sci. 2020, 217, 115513.
9. Xiao Liu, Jiaqiang Yang, Gurong Shen, Meiqing Shen, Yunkun Zhao, Kyeongjae Cho, Bin Shan* and Rong Chen*, “Tuning the structure of bifunctional Pt/SmMn2O5 interface for promoted low-temperature CO oxidation activity” Nanoscale, 2019, 11, 8150. (cover article)
10. Yanwei Wen, Jiaming Cai, Jie Zhang, Jiaqiang Yang, Lu Shi, Kun Cao, Rong Chen* and Bin Shan* “Edge selective growth of MCp2 (M=Fe, Co, Ni) precursors on Pt nanoparticles in atomic layer deposition: a combined theoretical and experimental study” Chem. Mater., 2019, 31, 101. (cover article)
11. Xiao Liu, Qian-Qian Zhu, Yun Lang, Kun Cao, Sheng-Qi Chu, Bin Shan*, Rong Chen* “Oxide nanotraps-anchored Pt nanoparticles with high activity and sintering resistance via area-selective atomic layer deposition” Angew. Chem. Int. Ed., 2017, 56, 1648.
12. Kun Cao, Lu Shi, Miao Gong, Jiaming Cai, Xiao Liu, Shengqi Chu, Bin Shan*, Rong Chen* “Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet-Selective Atomic Layer Deposition” Small, 1700648, 2017.
13. Qinyong Xiang, Binze Zhou, Kun Cao*, Yanwei Wen, Yun Li, Zhaojie Wang, Chenchen Jiang, Bin Shan, Rong Chen* “Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition” Chem. Mater. 2018, 30(23): 8486.
14. Rong Chen*, Kai Qu, Jiawei Li, Penghui Zhu, Chenglong Duan, Jing Zhang, Xiwen Li, Xiao Liu*, Zhijian Yang “Ultrathin Zirconia Passivation and Stabilization of Aluminum Nanoparticles for Energetic Nanomaterials via Atomic Layer Deposition” ACS Appl. Nano Mater., 2018, 1, 5500.
15. Kun Cao, Jiaming Cai, Xiao Liu, Rong Chen* “Catalysts design and synthesis via selective atomic layer deposition” J. Vac. Sci. Technol. A 2018, 36, 010801. (Invited review)
16. Xiaolei Wang, Yun Li, Jilong Lin, Bin Shan, Rong Chen* “Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition” Rev. Sci. Instrum., 2017, 88, 115108.
17. Rong Chen*, Ji-Long Lin, Wen-Jie He, Chen-Long Duan, Qi Peng, Xiao-Lei Wang, Bin Shan “Spatial atomic layer deposition of ZnO/TiO2 nano-laminates” J. Vac. Sci. Technol. A., 2016, 34, 051502.
18. Wen-Jie He, Hai-Tao Zhang, Zhi-Yong Chen, Ji-Long Lin, Kan Tian, Bin Shan, Rong Chen* “Temperature Control for Nano-Scale Films by Spatially-Separated Atomic Layer Deposition based on Generalized Predictive Control” IEEE Trans. Nanotechnol, 2015, 14(6), 1094.
19. Wen-jie He, Hai-tao Zhang*, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen* “Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor” IEEE Trans. Contr. Sys. Tech., 2015, 23(6), 2408.
20. Chen-Long Duan, Xiao Liu, Bin Shan, Rong Chen* “Fluidized bed coupled rotary reactor for nanoparticles coating via atomic layer deposition” Rev. Sci. Instrum., 2015, 86, 075101.
Prof. Rong CHEN is a professor of mechanical engineering from Huazhong University of Science and Technology (HUST), China. She is the deputy director of HUST flexible electronic research center, assistant dean for School of Mechanical Science and Engineering at HUST. She is also the Courtesy professor of School of optics and electronic information at HUST, and the Courtesy professor of Ningbo Institute of Industrial Technology of the Chinese Academy of Sciences (CAS).
Prof. Chen obtained her bachelor degree from University of Science and Technology of China (USTC) in 2001 and her Master and PhD degrees from Stanford University in 2006. Before she joined HUST as a full professor in 2011, she was a senior research scientist in Intel Labs and Applied Materials, Inc., Santa Clara, performing research and development in VLSI process and related equipment development.
Prof Chen’s research focuses on atomic level manufacturing, by understanding surface science, and applying this knowledge to a range of problems in sustainable energy, semiconductor processing, and nanotechnology. Her current research interests include selective atomic layer deposition method, nanoparticles modification, thin film technology for applications in catalysis, optoelectronics, and energy storage, as well as developing ALD apparatus for these emerging applications. Prof Chen is the PI for the key project of national natural science foundation of China, National Basic Research Program of China (973), Innovation team leader of Hubei Province, etc.
Prof. Chen has authored and co-authored over hundred publications on Nat. Comm., Adv Mater, Angew. Chem. Int. Ed, Small, Sci. Bullet., IJEM,OEA, etc. She has over 50 authorized patents (including 9 international patents) and authored 2 books and 2 chapters. She has given dozens of invited presentations, lectures and tutorials at international conferences such as IEEE Nano, AVS-ALD. She has served as a committee member of AVS ALD conference and chairs of several conferences (including the 5th International Conference on ALD Applications and 1st Asian ALD Meeting). She is the member of European Union HERALD and Asian ALD organization. Prof. Chen is the editor of Elsevier Physica B: condensed matter, the member of editorial committee of Engineering and NPG Scientific reports. She is IEEE senior member, and the member of AVS, ECS, ACS, etc.
Prof. Chen is also the recipient of many national prestigious awards from Chinese Ministry of science and technology, Ministry of Education, etc. She is also the recipient of the Simon Karecki award of Semiconductor Research Association, the Texas Instruments Woman’s Fellowship for Leadership in Microelectronics, China Overseas innovation talents contribution award, Geneva international innovation exhibition Special Gold awards,The first prize of Technological invention of Hubei Province,Intellectual Property Award of Hubei Province, etc.
See more at http://anml.hust.edu.cn
Academic Degrees
2001.06–2006.06 Stanford University Ph.D. in Physical Chemistry
2004.03–2005.09 Stanford University M.S. in Electrical Engineering
1996.09–2001.06 University of Science and Technology of China B.S. in Polymer Science and Engineering
Professional Experience
2011.08--present Professor, School of mechanical science and engineering, School of optical and electronic information by courtesy, Huazhong University of Science and Technology
2012.05--present Adjunct professor, Ningbo Institute of materials technology and engineering, Chinese Academy of Sciences
2015.07--present Associate director, HUST flexible electronics research center
2007.07--2011.08 senior research scientist, Intel Labs
2009.11--2011.08 In-house scientific advisor, Intel external research office
2006.07--2007.07 senior process engineer, Applied materials, Inc
Selected Publications
1. Xiao Liu, Shuangfeng Jia, Ming Yang, Yuanting Tang, Yanwei Wen, Shengqi Chu, Jianbo Wang, Bin Shan*, Rong Chen*, “Activation of subnanometric Pt on Cu-modified CeO2 via redox-coupled atomic layer deposition for CO oxidation” Nature Comm. 2020, 11, 4240.
2. Rong Chen*, Yicheng Li, Jiaming Cai, Kun Cao, Han-Bo-Ram Lee “Atomic Level Deposition to Extend Moore’s Law and Beyond” Inter. J. Extreme Manufacturing 2020, 2, 022002. (invited topic review)
3. Kun Cao, Jiaming Cai, Rong Chen* “Inherent selective atomic layer deposition and applications” Chem. Mater. 2020, 32, 2195. (invited perspective)
4. Kun Cao, Jiaming Cai, Bin Shan, Rong Chen*, “Nanoparticles surface functionalization through atomic layer deposition” Sci. Bulletin 2020, 65, 678. (invited review)
5. Yun Li, Yingfei Xiong, Huizhi Yang, Kun Cao, Rong Chen*, “Thin film encapsulation for the organic light-emitting diodes via atomic layer deposition” J. Mater. Res. 2020, 35, 681. (invited review, cover)
6. Binze Zhou, Mengjia Liu, Yanwei Wen, Yun Li, Rong Chen* “Atomic Layer Deposition for Quantum Dots based Devices” Opto-Electronic Advances 2020, 3, 190043. (invited review, cover)
7. Ming Zhao, Kun Cao, Mengjia Liu, Jing Zhang, Rong Chen*, Zhiguo Xia* “Dual-shelled RbLi(Li3SiO4)2:Eu2+@Al2O3@ODTMS phosphor as a stable green emitter for high-power LED Backlights” Angew. Chem. Int. Ed. 2020, 59, 2.
8. Wentao Cong, Zoushuang Li, Kun Cao, Guang Feng, Rong Chen* “Transient analysis and process optimization of the spatial atomic layer deposition using the dynamic mesh method” Chem. Eng. Sci. 2020, 217, 115513.
9. Xiao Liu, Jiaqiang Yang, Gurong Shen, Meiqing Shen, Yunkun Zhao, Kyeongjae Cho, Bin Shan* and Rong Chen*, “Tuning the structure of bifunctional Pt/SmMn2O5 interface for promoted low-temperature CO oxidation activity” Nanoscale, 2019, 11, 8150. (cover article)
10. Yanwei Wen, Jiaming Cai, Jie Zhang, Jiaqiang Yang, Lu Shi, Kun Cao, Rong Chen* and Bin Shan* “Edge selective growth of MCp2 (M=Fe, Co, Ni) precursors on Pt nanoparticles in atomic layer deposition: a combined theoretical and experimental study” Chem. Mater., 2019, 31, 101. (cover article)
11. Xiao Liu, Qian-Qian Zhu, Yun Lang, Kun Cao, Sheng-Qi Chu, Bin Shan*, Rong Chen* “Oxide nanotraps-anchored Pt nanoparticles with high activity and sintering resistance via area-selective atomic layer deposition” Angew. Chem. Int. Ed., 2017, 56, 1648.
12. Kun Cao, Lu Shi, Miao Gong, Jiaming Cai, Xiao Liu, Shengqi Chu, Bin Shan*, Rong Chen* “Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet-Selective Atomic Layer Deposition” Small, 1700648, 2017.
13. Qinyong Xiang, Binze Zhou, Kun Cao*, Yanwei Wen, Yun Li, Zhaojie Wang, Chenchen Jiang, Bin Shan, Rong Chen* “Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition” Chem. Mater. 2018, 30(23): 8486.
14. Rong Chen*, Kai Qu, Jiawei Li, Penghui Zhu, Chenglong Duan, Jing Zhang, Xiwen Li, Xiao Liu*, Zhijian Yang “Ultrathin Zirconia Passivation and Stabilization of Aluminum Nanoparticles for Energetic Nanomaterials via Atomic Layer Deposition” ACS Appl. Nano Mater., 2018, 1, 5500.
15. Kun Cao, Jiaming Cai, Xiao Liu, Rong Chen* “Catalysts design and synthesis via selective atomic layer deposition” J. Vac. Sci. Technol. A 2018, 36, 010801. (Invited review)
16. Xiaolei Wang, Yun Li, Jilong Lin, Bin Shan, Rong Chen* “Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition” Rev. Sci. Instrum., 2017, 88, 115108.
17. Rong Chen*, Ji-Long Lin, Wen-Jie He, Chen-Long Duan, Qi Peng, Xiao-Lei Wang, Bin Shan “Spatial atomic layer deposition of ZnO/TiO2 nano-laminates” J. Vac. Sci. Technol. A., 2016, 34, 051502.
18. Wen-Jie He, Hai-Tao Zhang, Zhi-Yong Chen, Ji-Long Lin, Kan Tian, Bin Shan, Rong Chen* “Temperature Control for Nano-Scale Films by Spatially-Separated Atomic Layer Deposition based on Generalized Predictive Control” IEEE Trans. Nanotechnol, 2015, 14(6), 1094.
19. Wen-jie He, Hai-tao Zhang*, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen* “Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor” IEEE Trans. Contr. Sys. Tech., 2015, 23(6), 2408.
20. Chen-Long Duan, Xiao Liu, Bin Shan, Rong Chen* “Fluidized bed coupled rotary reactor for nanoparticles coating via atomic layer deposition” Rev. Sci. Instrum., 2015, 86, 075101.
Awards and Honors
2020 |
HUST “Foreign Affairs award” |
2020 |
“Female science and technology innovation talents in Hubei Province” |
2019 |
National program of Leading scientific and technological talents |
2019 |
Annual major academic progress of HUST |
2019 |
HUST “Teacher's Professional Ethics award” |
2018 |
First Prize of Technical Inventions (Hubei 2018) |
2018 |
Special Gold Medal (with the congratulations of the jury) of 46th Salon International Inventions Geneva |
2017 |
The 12th China Ceramic Society Youth Science and Technology Award nomination Award |
2017 |
HUST 2016 intellectual property award |
2016 |
China Overseas innovation talents contribution award |
2016 |
Gold Medal of 44th Salon International Inventions Geneva and the special award for international invention by National search council of Thailand |
2016 2015 |
Two J. Vac. Sci. Technol. articles selected as monthly MOST READ ones Recipient of national science and technology innovation leading talents |
2015 |
Hubei Science Foundation for Distinguished Young Scholar |
2013 |
HUST 2013 Best Youth Award |
2009 |
New Century Excellent Talents by Chinese Education Ministry |
2008 |
Frost & Sullivan Innovation award for North American advanced massive storage technology |
2008 |
AlwaysOn Global 250 distinguished team |
2006 |
Semiconductor Research Corporation Simon Karecki Award for talented young researcher in the pursuit of innovations in environmental research |
Courses
Undergraduate-Level Courses:
1. Introduction of Nanotechnology
2. Nanotechnology in Daily Life
Graduate-Level course:
1. Thin Film Technology
2. Advanced Manufacturing Engineering
Projects
1. “Cross-scale atomic layer deposition manufacturing methodology for the stabilization of flexible quantum dots optoelectronic displays” Key project of the National Natural Science Foundation of China (51835005), Project leader.
2. “Design and synthesis of nanocatalysts via selective atomic layer deposition for high efficient water-gas shift reaction” International (regional) cooperation and exchange project of National Natural Science Foundation of China (51911540476), Project leader.
3. “Atomic-level manufacturing and measurement”, Innovative Research Team Project of Natural Science Foundation of Hubei Province (2020CFA030), Project leader.
4. “Research of the encapsulation methodology for the quantum dots films”, Application-based Frontier project of Wuhan City, Project leader.
4. “Research of the encapsulation methodology for the quantum dots films”, Application-based Frontier project of Wuhan City, Project leader.
5. “Development of magnetic-optical materials for integrated on-chip silicon waveguide insolators”,Industry-university-research cooperation project with Huawei (YBN2019105148), Project leader
6. “Cultivation of the high-value patent portfolio for the equipment and processes of atomic layer deposition”, The 1st Construction projects of the cultivation of high-value patent portfolio of Intellectual property operation service system of Wuhan city. (20201G06), Project leader.
7. “The theory and method for the rapid atomic layer deposition on the surfaces of the 3-D irregular structures” (2019kfyXMBZ025), Key project of the independent innovation research foundation of HUST, Project leader.
8. “Development of the principle and equipment high sensitive water-oxygen permeation detection based on differential pressure mass spectrometry”,Key project of the State key laboratory of digital manufacturing equipment and technology (0225100102), Project leader.
9. “Study of key technology for the reduction of noble metals via atomic layer deposition”,Industry-university-research with Weifu Group, Project leader.
10. “Demonstration and application of the key technology for the coating of the elongated hole part via chemical vapor deposition - Driving theory of CVD thermal protection permeation layer on the surface of ultra-fine and ultra-long inner holes of high-temperature working alloy components”, National Key Research and development plan for manufacturing basic technology and key components, core member.
completed:
1. “Rational Design and Property Tuning of High Efficient Metal-Oxide Compound Catalyst”, 973 Youth Scientist Projects under Major National Scientific Research Program of China (2013CB934800), The chief scientist.
2. “Fundamental study on spatially-separated atomic layer deposition system for flexible electronics”, General project of the National Natural Science Foundation of China (51575217), Project leader.
3. “Research of the core technology and equipment for the coating of micro-nano particles via atomic layer deposition”, Outstanding Youth foundation of Natural Science foundation of Hubei Province (2015CFA034), Project leader.
4. “Growth of the nano catalyst particles with controllable components and size via atomic layer deposition”, Youth foundation project of National Natural Science Foundation of China (51101064), Project leader.
5. “Development of thin film encapsulation techniques via atomic layer deposition”, Industry-university-research cooperation project with Wuhan China Star Optoelectronics Corporations, Ltd. Project leader.
6. “Investigation into the Key Problems on Cross-scale Manufacturing of Flexible Quantum Dots Opto-electronic Devices of High Stability” (2016YXZD065), Key project of the independent innovation research foundation of HUST, Project leader.
7. “Research of the atomic-level modification of the multi-interfaces catalyst via atomic layer deposition”, Key project of the State key laboratory of digital manufacturing equipment and technology (0225100063), Project leader.
8. “High-efficiency coating of the micro-nano particles via atomic layer deposition”, The frontier research project of the independent innovation research foundation of HUST, (2014TS037), Project leader.
9. “Research of the mechanism and design of the atmospheric-pressure atomic layer deposition system”, The frontier research project of the independent innovation research foundation of HUST, (2012TS076), Project leader.
10. “Theoretical and experimental research of the growth of nanoparticles via atomic layer deposition”, Key project of the State key laboratory of digital manufacturing equipment and technology (0225100053), Project leader.