极大规模集成电路制造装备及成套工艺、准分子激光器放大腔的流场分析与注入锁定放大方法预研
- Leading Scientist:陆培祥
- Project description:440万元、结题、参加。
- Supported by:National Major Special Programs
- Project Participants:左都罗,王新兵,朱海红等
- Project Number:2009ZX2206
- Classification of Disciplines:Engineering
- First-Level Discipline:Other specialties in Optical Engineering
- Date of Project Approval:2009-07-01
- Date of Project Completion:2012-06-30
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大尺寸、高精度复杂金属构件激光增材/减材复合制造技术及装备研究
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