·Paper Publications
Uniformity analysis of temperature distribution in an industrial MOCVD reactor
Release time:2019-05-30 Hits:
Indexed by: Journal paper
First Author: Jiang Zheng
Correspondence Author: Zhiyin Gan;Haisheng Fang
Journal: Crystal Research and Technology
Included Journals: SCI
Document Type: J
Volume: 51
Issue: 10
Page Number: 617-626
Uniformity analysis of temperature distribution in an industrial MOCVD reactor.pdf