·Paper Publications
Molecular dynamics simulation of temperature effects on deposition of Cu film on Si by magnetron sputtering
Release time:2019-05-30 Hits:
Indexed by: Journal paper
First Author: Guo Zhu
Correspondence Author: Zhiyin Gan
Journal: Journal of Crystal Growth
Included Journals: SCI
Document Type: J
Volume: 492
Issue: 15
Page Number: 60-66
Molecular dynamics simulation of temperature effects on deposition of Cu film on Si by magnetron sputtering.pdf