·Paper Publications
Molecular dynamics simulation of aluminum nitride deposition: temperature and N : Al ratio effects
Release time:2019-05-30 Hits:
Indexed by: Journal paper
First Author: Libin Zhang
Correspondence Author: Zhiyin Gan
Journal: Royal Society Open Science
Included Journals: SCI
Document Type: J
Volume: 5
Issue: 8
Page Number: 1-13
Molecular dynamics simulation of aluminum nitride deposition temperature and NAl ratio effects.pdf