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Rong Chen

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Patents

一种基于流化床的纳米颗粒空间隔离原子层沉积设备及方法

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:巴伟明,zhuqianqian,文艳伟,Bin Shan,曹坤,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201610361332.1

Number of Inventors:2

Authorization Date:2016-05-30

First Author:Rong Chen

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