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Rong Chen

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一种用于制作原子层沉积薄膜的可拆卸喷头及装置

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:文艳伟,Bin Shan,褚波,段晨龙,何文杰,Saito,Yuji,Mullings,N.,Marja,Jiang,Xirong,Chen,Rong,Bent,F.,Stacey

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201310636874.1

Number of Inventors:6

Authorization Date:2013-12-02

First Author:陈蓉,Bent,F.,Stacey

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