Teaching Information
Release time: 2022-10-31Hits:
  • Course Introduction:本课程为真空专业专业基础课,它全面系统地介绍了各种真空镀膜原理、特点及其应用。主要内容包括真空镀膜定义、薄膜生长,真空蒸发、溅射镀膜,等离子体离子镀,电弧离子镀,化学气相沉积等多种真空镀膜原理、系统及主要组成元件结构,特点及工艺。通过本课程的学习,使学生掌握一般真空镀膜方法,并能够根据具体情况,选择合适的镀膜方法,制定相应的工艺路线,为后续的毕业设计奠定坚实的基础。
  • Schedule:2022-09-01:主楼402*;2022-09-19:主楼402*;2022-09-12:主楼402*;2022-10-03:主楼402*;2022-10-06:主楼402*;2022-09-05:主楼402*;2022-09-26:主楼402*;2022-09-29:主楼402*;2022-09-08:主楼402*;2022-09-15:主楼402*;2022-08-29:主楼402*;2022-09-22:主楼402*;2022-10-13:主楼402*;2022-10-10:主楼402*
  • Teacher:方应翠
  • School Year:2022-2023
  • Semester:Autumn Term
  • Course number:0212150X
  • Credits:2.0
  • Course Type:Undergraduate Course:
  • Top-Quality Courses or Not:no
  • Maximum Number of Students:76
  • Required Class Hours:32.0
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Doctoral degree

Yingcui Fang
Hefei University of Technology
MOBILE Version